2

Hydrodynamics of Slurry Flow in Chemical Mechanical Polishing

Year:
2006
Language:
english
File:
PDF, 826 KB
english, 2006
6

An Approach to Modeling Particle-Based and Contact-Based Wear in CMP

Year:
2007
Language:
english
File:
PDF, 1.06 MB
english, 2007
20

Application of Smoothed Particle Hydrodynamics to Full-Film Lubrication

Year:
2013
Language:
english
File:
PDF, 1.84 MB
english, 2013